JPH0238365Y2 - - Google Patents

Info

Publication number
JPH0238365Y2
JPH0238365Y2 JP1984169653U JP16965384U JPH0238365Y2 JP H0238365 Y2 JPH0238365 Y2 JP H0238365Y2 JP 1984169653 U JP1984169653 U JP 1984169653U JP 16965384 U JP16965384 U JP 16965384U JP H0238365 Y2 JPH0238365 Y2 JP H0238365Y2
Authority
JP
Japan
Prior art keywords
cathode
electron beam
electron
line
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984169653U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6183245U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984169653U priority Critical patent/JPH0238365Y2/ja
Publication of JPS6183245U publication Critical patent/JPS6183245U/ja
Application granted granted Critical
Publication of JPH0238365Y2 publication Critical patent/JPH0238365Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1984169653U 1984-11-08 1984-11-08 Expired JPH0238365Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984169653U JPH0238365Y2 (en]) 1984-11-08 1984-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984169653U JPH0238365Y2 (en]) 1984-11-08 1984-11-08

Publications (2)

Publication Number Publication Date
JPS6183245U JPS6183245U (en]) 1986-06-02
JPH0238365Y2 true JPH0238365Y2 (en]) 1990-10-16

Family

ID=30727372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984169653U Expired JPH0238365Y2 (en]) 1984-11-08 1984-11-08

Country Status (1)

Country Link
JP (1) JPH0238365Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6529920B2 (ja) 2016-03-01 2019-06-12 株式会社日立ハイテクノロジーズ 電界放出電子源、その製造方法および電子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5796450A (en) * 1980-12-09 1982-06-15 Toshiba Corp Electron gun
US4486684A (en) * 1981-05-26 1984-12-04 International Business Machines Corporation Single crystal lanthanum hexaboride electron beam emitter having high brightness

Also Published As

Publication number Publication date
JPS6183245U (en]) 1986-06-02

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